Deep-Level Transient Spectroscopy System
Since developed in the early 80th the Deep-Level Transient Spectroscopy has grown up to a most powerful tool for semiconductor characterization with unbeaten sensitivity in trap concentration detection and high efficiancy in impurity parameter determination.
Handling difficulties of the analog DLTS systems could drastically be reduced by a digital system with powerful software enhancing flexibility and user friendliness.
This DLTS system developed by PhysTech with close cooperation to the University of Kassel has been licenced to BIO-RAD Micromeasurement Ltd. and became as BIO-RADīs DL 8000 DLTS the standard in word wide installed DLTS systems.
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